基于光子共振微腔的双色高效量子阱红外探测器研究

项目名称： 基于光子共振微腔的双色高效量子阱红外探测器研究

项目编号： No.61774145

项目类型： 面上项目

立项/批准年度： 2018

项目学科： 无线电电子学、电信技术

项目作者： 种明

作者单位： 中国科学院半导体研究所

项目金额： 16万元

中文摘要： 量子阱红外探测器（QWIP）被公认为第三代红外焦平面探测器，向着大面阵、多色的方向发展，是实现凝视型多色大焦平面阵列最佳技术之一。而由于量子跃迁选择定则的限制，使得垂直入射的光不能被量子阱吸收，必须采取衍射结构改变波矢方向，目前量子效率还相对较低。针对这一问题，本项目提出利用光子微腔的量子调控功能及共振增强吸收效应来提高QWIP的量子效率，在前期的初步设计计算中，利用啁啾多圆环结构，我们得到中长波双色40%以上的量子效率，目前国内外还未见关于双色共振微腔设计的报道，本项目将继续完善设计，并进行实验研究。课题组在量子阱红外探测器及光子微腔研究方面已有十几年的积累，将二者结合的新型探测器有助于推动理论和技术的进步。本项目将在光子双色共振微腔理论及其在双色量子阱红外探测器的应用和实现上做深入的研究，同时解决影响微腔性能的衬底精确减薄工艺。目标是使现有10-20%的量子效率提高到30-40%。

中文关键词： 量子阱红外探测器；双色；共振微腔

英文摘要： Quantum well infrared photodetectors (QWIP) is widely recognized as the third generation infrared focal plane arrays. At present, the development direction of QWIP is large arrays and multi-color arrays. It has received much attention in the world because the new generation of quantum well infrared focal plane array is one of the best technological approaches to realize multi-color staring focal plane arrays.And due to the limitations of the quantum transition selection rule, the vertical incident light can’t be absorbed by the quantum wells,some diffraction structure must be taken to change the direction of the wave vector. The quantum efficiency is relatively low. In order to solve this problem,this project proposes to improve the quantum efficiency of QWIP by using the quantum control function of the photon micro-cavity and the resonance enhanced absorption effect,and to explore the theory and the realization.We have obtained over 40% efficiency for two-color with chirp multi ring structure from calculation and not to be reported.We shall continue to finish the design theory and realization.The research group has rich technology accumulations of more than ten yearsin the field of quantum well infrared photodetectors and photonic micro-cavity,the combination of the quantum well infrared photodetectors and photonic micro-cavity will promote the progress of theory and technology.This project will make a systematic research on the theory and design of the two-color photon resonance micro-cavity and its application in two-color quantum well infrared detectors,and also solve the key problems such as the accurate substrate thinning and so on. The quantum efficiency will be improved from the existing10-20% to 30-40%.

英文关键词： quantum well infrared photodetectors;two-color;resonant micro-cavity