808nm腔面光栅波长锁定半导体激光器的研究

项目名称： 808nm腔面光栅波长锁定半导体激光器的研究

项目编号： No.11474036

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 数理科学和化学

项目作者： 王勇

作者单位： 长春理工大学

项目金额： 95万元

中文摘要： 本项目针对半导体激光器传统的波长锁定方案中由于外腔波长锁定系统对外部环境的依赖，和内置光栅方案中由于芯片进行二次外延生长会产生污染和引进缺陷等问题，拟采取在边发射半导体激光器有源区的出光面制作光栅的一种全新的半导体激光器波长锁定方案。研究腔面光栅的工作机理，探索腔面光栅的周期、占空比与光栅耦合系数之间的关系，建立一种新的腔面光栅耦合模型。开展半导体激光器腔面匀胶技术的研究，设计支撑芯片进行匀胶工艺的芯片夹具，探索芯片夹具的压力、尺寸、重量对光刻胶厚度和均习性等参数的影响，解决半导体激光器腔面上难以匀胶的问题。开展全息光刻技术的研究，优化全息光刻条件，以获得高质量的光刻图形。开展腔面光栅膜层沉积工艺技术的研究，优化膜系材料沉积的工艺条件和参数，提高膜层的沉积质量，实现高质量光栅材料在腔面上的均匀沉积，为微纳米工艺技术在半导体器件领域的应用提供理论基础和技术储备。

中文关键词： 半导体激光器；腔面；光栅；镀膜

英文摘要： Aiming at the existing problems of traditionally wavelength-locked laser diodes (LDs), that outer wavelength lock system strongly depends on environment, and inner grating fabrication process results in contamination and introduces defects in the epilayers due to regrowth, a novel method to realize wavelength lock by grating coating on the facet of LD is proposed in this project. Firstly, research on the mechanism of facet grating will be carried out, and a new model of grating coupling will be built by exploring the relationship between periode, duty cycle and coupling coefficient of grating. Secondly, research on the spin coating of photoresist on the facet of LD will be carried out. A tool of supporting chip for spin coating will be designed to solve the problem of hard spin coating on the facet of LD, by exploring the effect of press, size, weight of supporting tool on the thickness and uniformity of photoresist. Additionally, research on laser holography technology will be carried out. The conditions of holography lithography will be optimized to achieve high quality photolithography patterns. Furthermore, research on the coating process of facet grating will be carried out. By optimizing coationg process conditions and parameters of grating films, and improving quality of grating films, the uniform coating of high quality grating on facet of LD should be realized. So that the researches in this project will provide theoretical basis and technical reserve on the application of nano fabrication process in the field of semiconductor devices.

英文关键词： Laser Diode;Facet;Grating;Coating