基于氧化石墨烯的超灵敏度真空检漏校准基础问题研究

项目名称： 基于氧化石墨烯的超灵敏度真空检漏校准基础问题研究

项目编号： No.U1537109

项目类型： 联合基金项目

立项/批准年度： 2016

项目学科： 机械、仪表工业

项目作者： 闫荣鑫

作者单位： 北京卫星环境工程研究所

项目金额： 51万元

中文摘要： 密封性能是真空装置或真空器件一项重要的性能指标，随着航天技术的发展，真空器件越来越小，寿命越来越长，对漏率的要求越来越高，现存的检漏方法中，灵敏度最高的氦质谱检漏技术和四极质谱检漏技术尚不能完成对这些元器件检漏任务。本项目针对目前的检漏灵敏度不能满足真空器件的需求，通过研究氧化石墨烯薄膜氦气渗透率与本身厚度、环境温度、压差的关系，以及氧化石墨烯薄膜渗氦稳定时间的影响因素等问题，分析了氧化石墨烯的渗氦传质机理，揭示了基于氧化石墨烯渗氦薄膜标准漏孔的设计方法，解决被测真空器件极小泄漏率的标定和极小漏率真空检漏系统的校准问题，提出采用基于氧化石墨烯的超灵敏度检漏系统校准方法，对提高真空器件检漏可靠性以及密封结构设计具有十分重要的意义。

中文关键词： 真空检漏；超灵敏度；校准；氧化石墨烯；极小气体流量

英文摘要： Sealing performance is an important performance index of vacuum devices. With the development of space technology, vacuum devices become much smaller, live longer, requirements of the lower leakage rate. The existing methods of leak detection, helium mass spectrometer leak detection technology and Quadrupole mass spectrometer leak detection technology, which had the highest sensitivity, is not to complete for these components detection task. This project aimed at the sensitivity of leak detection is to meet the demand of vacuum device, through the study on the relationship between helium permeability of graphene oxide film thickness and the factors of ambient temperature, pressure difference, and effects factors of graphene oxide film helium stable time, analyzes the mechanism of mass transfer of helium permeability of graphene oxide, reveals the design method of standard helium leak based on graphene oxide thin film, solves the measured problems of the minimum leakage rate of vacuum device and the calibration problems of the vacuum leak detection system of minimum leakage rate. Then, the vacuum leak detection system method of ultra sensitive graphene oxide has been proposed, which has very important significance to improve the detection reliability of vacuum device and seal structure design.

英文关键词： vacuum leak detection;extra-high sensitivity;calibration;graphene oxide;extremely low gas flow