基于MEMS技术的光栅结合可动Fabry-Perot腔微型光谱仪研究

项目名称： 基于MEMS技术的光栅结合可动Fabry-Perot腔微型光谱仪研究

项目编号： No.61308064

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 无线电电子学、电信技术

项目作者： 方亮

作者单位： 中国科学院光电技术研究所

项目金额： 25万元

中文摘要： 本项目针对光栅光谱仪微型化后分辨率会降低的问题，提出采用基于MEMS技术将光栅与可动Fabry-Perot腔组成联合色散模块的方案，构建一种宽自由光谱范围，高光谱分辨率的MEMS微型光谱仪。通过对联合色散模块光强调制函数以及光学特性的理论研究，分析提高光谱分辨率的主要因素，确定分光系统的极限光谱分辨率；对MEMS联合色散模块中的平动微镜极板进行力学分析，确立不同驱动结构下电压与极板位移的函数关系以及它们对MEMS平动微镜的平行度、控制精度等参数的影响。研究和分析在光谱扫描过程中可动Fabry-Perot腔腔长调制精度和探测器采样率对光谱测量误差以及工作效率的影响，并确定光谱扫描合成及波长定标等数据处理方式。研究成果有助于促进MEMS技术在光谱测量领域的应用，推动新型微型光谱仪的发展。

中文关键词： 微型光谱仪；联合色散；可动法布里-珀罗腔；光栅；微机电系统

英文摘要： Aiming at the problem of the decrease of the grating spectrometer resolution performance in the miniaturisation process, this project proposes a scheme of the combination of grating and tunable Fabry-Perot cavity based on MEMS technology and constructs a MEMS microspectrometer with wide FSR and high spectral resolution. The key reason for improving the spectral resolution will be analysed and the limitation of spectral resolution will be determined by the theoretical research on optical intensty modulation function and optical characteristics of combined dispersion model. The mechanics characteristics of micromirror plate in fabry-perot cavity will be studied to evaluate the influence on the parallelism of micromirror and control precision. The relationship between driving voltage and the displacement of electrode plate will be obtained. In addition, the dependence of the spectral measurement error and the work efficiency of microspectrometer on the modulation precision of cavity length of Fabry-Perot and the sampling rate of detector will be investigated in spectral scanning process. Meanwhile, the means of the synthesis of all spectrum and the calibration of wavelength will be also explored in the data processing. This project will be promote the application of MEMS technology in the spectral measurement fiel

英文关键词： Miniature spectrometer；Combinative disperse；Tunable Fabry-Perot cavity；Grating；Micro-Electro –Mechanical Systmes(MEMS)