基于层状电磁复合材料的磁声表面波磁敏传感器研究

项目名称： 基于层状电磁复合材料的磁声表面波磁敏传感器研究

项目编号： No.61271031

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 无线电电子学、电信技术

项目作者： 白飞明

作者单位： 电子科技大学

项目金额： 75万元

中文摘要： 磁场探测在生产生活和国防安全领域都有着重要的作用，一些新兴的应用如地磁辅助导航、航空磁探仪和心脑磁图成像对磁敏传感器的磁场灵敏度、倾斜角分辨率、频率相关性和体积等提出了越来越高的要求。在前期工作中我们设计并制作了基于磁电耦合效应的磁场传感器，其磁场灵敏度高达0.01n Tesla/Hz1/2量级，但也存在着一致性差、难以微型化等缺点。本项目拟从提取和处理层状电磁复合薄膜的场致波动信号出发，研究压电/磁致伸缩/基片体系中磁声表面波的传播规律，建立相传播速度、中心频率、带宽、插入损耗与层状结构和工作模态的关系，并结合薄膜材料制备、集成工艺优化、插指换能器设计，制备出磁声表面波磁敏传感器；在此基础上，进行动态加载磁场和变温测试，通过力、电、磁的多场耦合效应的分析，进一步优化结构设计和材料性能，最终获得高磁场灵敏度、高倾斜角分辨率的磁声表面波磁敏传感器，推动层状电磁复合材料的应用与发展。

中文关键词： 磁场传感器；电磁复合材料；声表面波；杨氏模量效应；

英文摘要： Magnetic field sensors are very important for industry and national security. Some emerging applications like geomagnetic field navigation, aviation magnetic field detection, magnetoencephalography and magnetocardiography requires put higher and higher requirements on magnetic field and angular inclination sensitivity and device volume. In our previous work, we have designed and fabricated magnetic field sensors based on laminated magnetoelectric composite. The sensitivity can reach 0.01n Tesla/Hz1/2. But the uniformity needs to be improved and it is also difficult to be miniaturized. In current work, we propose to pick up and analyze the magnetic-field induced vibration signal instead of electrical charge, and study the magnetic surface acoustic wave of the piezoelectric/magnetostrictive/substrate system. The dependence of the phase velocity, central frequency, bandwidth and insertion loss on the layer thickness and working mode will be investigated. This will be combined with the efforts of improving integration processing and interdigital electrode transformer design, which will allow us to obtain magnetic surface acoustic wave device. Then the device will be tested under different temperature and applied magnetic field. Through the analysis of the force, electrical and magnetic multi-field coupling effect, w

英文关键词： Magnetic field sensor；Electromagnetic composite materials；surface acoustic wave；Delta E effect；