高功率准连续半导体激光器列阵腔面光学灾变损伤研究与提高

项目名称： 高功率准连续半导体激光器列阵腔面光学灾变损伤研究与提高

项目编号： No.61504167

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 王贞福

作者单位： 中国科学院西安光学精密机械研究所

项目金额： 21万元

中文摘要： 准连续半导体激光器及其泵浦的固体激光器、光纤激光器在先进制造、医疗美容、航空航天、军事国防等领域的具有广阔的应用前景。腔面光学灾变损伤（COMD）已经成为制约准连续半导体激光器峰值功率和可靠性进一步提高的重要瓶颈。COMD水平提高关键在于对腔面表面物理的研究，腔面的表面态和界面态的形成及其电子空穴的非辐射复合产热的机理研究，腔面不饱和悬挂键的钝化与镀膜关键技术突破。本项目主要开展半导体激光器腔面表面态物理研究，对腔面的悬挂键、自身缺陷等表面态对水分子、碳氧化合物、杂质颗粒的吸附机理进行深入研究，明确不同能级深度的表面态对激射波长的光吸收机理，探索新型腔面刻蚀技术，去除腔面吸附的水分子和杂质吸附，开发腔面刻蚀清洗、腔面钝化和腔面镀膜三位一体的腔面处理技术，避免二次污染，最终实现808nm准连续半导体激光器阵列COMD峰值功率大于800W，满足日益增长的泵浦需求。

中文关键词： 半导体激光器列阵；腔面光学灾变损伤；峰值功率；表面态；非辐射复合

英文摘要： Quasi-continuous laser diode array and its pumped solid state laser, fiber laser are widely used in the field of advanced manufacturing, medical cosmetology, aerospace, military and national defense etc. The catastrophic optical mirror damage (COMD) has become the main bottleneck of peak power and reliability for quasi-continuous laser diode array. The key to improve the COMD level is to thoroughly study the facet surface physics, including the mechanism of formation of cavity surface states and interface states, heat generation by electrons and holes non-radiative recombination, the passivation of unsaturated dangling bonds, and the coating technology breakthrough. This project will study the surface state physics, the mechanism of laser adsorption on the surface state, interactions between surface defects and water molecules, carbon oxygen compounds, and impurity particles. We will explore the new facet surface etching technology removing water molecules and impurity particle, cavity surface passivation and quality film coating. The three-in-one surface treatment technologies, which effectively avoid the pollution, will enable the realization of 808nm quasi-continuous laser diode array COMD peak power of 800W, to meet the growing demand for laser pumping.

英文关键词： Laser diode array;Catastrophic optical mirror damage;Peak power;Surface state;Non-radiative recombination