基于聚焦光束扫描的高空间分辨面型检测技术研究

项目名称： 基于聚焦光束扫描的高空间分辨面型检测技术研究

项目编号： No.11505212

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 数理科学和化学

项目作者： 杨福桂

作者单位： 中国科学院高能物理研究所

项目金额： 23万元

中文摘要： X射线光学元件面型检测水平是限制束线性能发挥的关键因素。常用的面型测量设备如LTP（Long trace Profiler）和NOM(Nano-Optic-Measuring Machine)存在无法进行高频段面型检测的问题，而空间分辨率较高的拼接干涉仪无法测量具有圆柱面、椭球面等面型的X射线光学元件。因此，发展新型高空间分辨面型检测技术对全面的X射线光学元件面型表征非常重要。本项目拟采用基于聚焦光束扫描的问题解决方案，根据长程扫描测量设备的特点，对光学头及其运动扫描机制进行基础科学研究。具体研究内容包括：光学头内光束传播特性分析与计算，揭示测量系统内经多种光学变换后探测光束的特征；研究可提高测量精度的光束整形处理及相应的光束定位方法；建立光学头-运动扫描机制匹配的技术方案，发展误差评估方法。通过本项目的实施，为基于聚焦光束扫描的高空间分辨面型检测装置的优化设计及建设奠定理论和技术基础。

中文关键词： 高精度面型检测；光学检测；X射线光学；KB聚焦镜；反射镜

英文摘要： X-ray optics surface metrology is a key factor that limits the performance of the beam line to play. The problem of the traditional long trace profiler (LTP) is that it cannot provide high-frequency information about the surface error, and the stitching interferometer can not measure the cylindrical or ellipsoid surface . So, Developing surface metrology instrument with high spatial-resolution is very important for the full characterization of X-ray optics. The project uses focused beam scanning method to solve this problem. According to the feature of long trace metrology equipment, basic scientific research on optical head and its scanning mechanisms is carried out. Specific research contents include: characteristics analysis and calculation of optical beam propagation in the head, to reveal the characteristics of the measured beam after a variety of optical transformation; Study beam shaping process and the corresponding beam positioning algorithm to improve the accuracy of measurement; Establish feasible scanning mechanism and its optical head design, develop system errors’ evaluation methods. The implementation of this project will provide theory support and technology foundation for the optimal design and construction of the high-spatial resolution surface shape profiler based on the focused beam scanning.

英文关键词： high-precision surface metrology;Optical Metrology;X-ray Optics;KB focusing mirror;Mirror