硅基纳米晶微波介质陶瓷薄膜的取向生长制备及其性能研究

项目名称： 硅基纳米晶微波介质陶瓷薄膜的取向生长制备及其性能研究

项目编号： No.61501409

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 董和磊

作者单位： 中北大学

项目金额： 21万元

中文摘要： 介质薄膜/硅集成是实现电子器件多功能、小型化、集成化的重要途径；纳米晶微波介电陶瓷薄膜中晶粒的取向对晶体的微结构具有较大影响，并最终影响薄膜的介电常数和损耗等性能。本项目拟以(Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 (BSZN)微波介质陶瓷材料为研究对象，采用Sol-Gel法制备纳米晶薄膜，深入探讨BSZN纳米晶薄膜的取向生长特性，分析其晶粒取向、有序结构与介电性能的关系。研究控制晶粒取向生长的关键因素及不同晶粒取向时的介电响应和有序结构；分析BSZN薄膜的晶格振动光谱，利用第一性原理计算理想结晶状态时薄膜的本征介电性能。理论结合实验，以晶格振动模式为媒介阐明不同取向的BSZN纳米晶薄膜微结构与介电性能的关联性。本项目的实施可有效促进介质/半导体集成器件的发展。

中文关键词： 薄膜制备；薄膜性能；薄膜设计机理；溶胶-凝胶；微观机理

英文摘要： The dielectric film/silicon integrated structure is an important method to realize the multifunction, miniaturization and integration of the electronic devices. The dielectric properties of the nanocrystalline microwave dielectric ceramic thin films were affected by the grain orientation significantly. In this project, we will apply Sol-Gel method to fabricate the (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 (BSZN) nanocrystalline thin films, the orientation growth characteristics of the thin films will be discussed in depth, and the relationship between their crystal orientations, ordered superstructures and dielectric properties will be clarified. The key control factors for the orientation growth of grains will be studied in detail. The corresponding dielectric response and the ordered superstructures will be studied with different grain orientations. The lattice vibration spectroscopy of the oriented thin films will be analyzed in detail. The intrinsic dielectric properties of the oriented BSZN thin films with the ideal crystalline state will be calculated by the first principle theory. At last, with the combination of theory and experiment, the correlation between the microstructures and the dielectric properties of the nanocrystalline films with different orientations will be clarified with lattice vibrational modes as the media. The implementation of this project effectively promotes the development of the dielectric film/silicon integrated devices.

英文关键词： thin film preparation;thin film properties;Thin film design mechanism;Sol-Gel;Microscopic Mechanism