基于高量值复现性与精确多参量模型的圆柱度量值溯源方法

项目名称： 基于高量值复现性与精确多参量模型的圆柱度量值溯源方法

项目编号： No.51475110

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 机械、仪表工业

项目作者： 黄景志

作者单位： 哈尔滨工业大学

项目金额： 80万元

中文摘要： 针对圆柱度量值溯源中存在的仪器测量系统标定误差大、复现性差的问题，以及仪器四自由度姿态调整误差难以消除的问题，开展如下研究：1)提出一种基于椭圆轮廓标准量的仪器测量系统动态标定方法，以椭圆轮廓长轴与短轴的半径差作为标准量，融合形状测量低通滤波机理，实现仪器测量系统的高复现性标定；2)提出一种基于共面正交及球面导向的四自由度姿态调整解耦方法，充分利用在球心截面处转动分量(θx-θy)与平移分量(x-y)耦合效应最小的特性建立解耦模型，研究解耦机理；在此基础上，建立包含被测圆柱度标准器倾斜分量与偏置分量的圆柱轮廓精确测量模型，并提出基于多参量精确求解的姿态调整误差与偏置误差的消除方法；3)主要指标：由仪器测量系统标定与姿态调整引起的圆柱度校准误差小于20nm/100mm。该项目的完成,可为提升圆柱度量值溯源精度提供理论依据与技术支撑,为建立新的国家标准与校准规范以及新的国际标准奠定基础。

中文关键词： 量值溯源；圆柱度；模型解耦；椭圆标准器；复现性

英文摘要： To solve the problem of the low reproducibility of measuring system of cylindricity measuring instrument, and eliminate the attitude adjustment error of the instrument during the process of cylindricity value traceability, the following researches will be carried out: 1)A new dynamic calibration method for measuring system of instrument is proposed, the basic principle of the method is based on standard elliptic contour, and taking the radius difference of the major axis to the minor axis of the ellipse contour as the standard value.At the same time, a low-pass filter for data processing is used to achieve the high reproducibility for the calibration of instrument measuring system. 2) A decoupling method for the position adjustment of four degrees of freedom is developed,which is based on the coplanar orthogonal and spherical-oriented principle.This method will take full advantage of the minimum coupling effect of rotating component (θx-θy) with the translational component (x-y),and it is in the cross-section at the center of the sphere surface to establish the characteristics of the decoupling model,and the decoupling mechanism will be researched. Moreover, a new method concerning eliminating the residual errors and the offset errors on the basis of multi-bias parameters to get exact solutions of the parameters will be derived. 3) The major technological inspection: the calibration error for the cylindricity is less than 20nm/100mm, the errors are caused mainly by the measuring system calibration and the position adjustment offset. The research of the project can provide a theoretical basis and technical support for improving the cylindricity traceability precision, and lay the foundation for the establishment of new national or international standards and calibration specifications.

英文关键词： Traceability of quantity value;Cylindricity;Model decoupling;Elliptical standards;Reproducibility