碳纳米管仿生连接器的制备与性能研究

项目名称： 碳纳米管仿生连接器的制备与性能研究

项目编号： No.51302122

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 一般工业技术

项目作者： 张振兴

作者单位： 兰州大学

项目金额： 25万元

中文摘要： 开发基于新材料和新连接机制的纳米连接器是当前半导体产业高性能、微型化发展的迫切需求。申请人前期研究发现，仿壁虎脚结构的锗基纳米线核壳结构阵列能利用阵列相互穿透接触形成的范德瓦尔斯力实现元件之间的物理连接、壳层金属实现电气连接，通过对材料及其结构的进一步优化有望满足上述需求。本项目拟采用等离子增强化学气相沉积技术在导电性势垒层上生长仿壁虎脚的金属性的多壁性碳纳米管阵列，研究制备工艺对碳纳米管性质的影响，以及后续表面处理对碳纳米管性质及连接器力学、电学性质和可靠性的影响，寻找合适的工作参数,并探讨连接器的作用机制，最终获得具有选择性、高黏附力、易插拔、可重复使用、机械强度高以及电学和热学性能优越等特点的纳米连接器。本项目不仅对纳米连接器的制备与工作机理有一定的基础研究意义，而且对开发实用的高档连接器、3D集成互连也有重要的参考意义。

中文关键词： 多壁碳纳米管；仿生连接器；等离子增强化学气相沉积；表面修饰；柔性

英文摘要： To develop the novel nanoconnector applying new materials and new connection mechanism has its great significance in achieving the state of high performance and miniaturization in semiconductor industry. Based on preliminary studies, the applicant found that the gecko-feet-inspired Ge nanowire-based hybrid core/shell arrays can take advantage of van der Waals forces, induced by the mutual penetration and close contact of nanoarrays, to achieve physical connection, and make use of the shell metal material to achieve electrical connection between the two components. Through further optimization of the material and its structure,these bio-snspired nanoarrays are of great value to the development of the novel nanoconnector.This project is proposed to use plasma enhanced chemical vapor deposition technique to grow gecko-feet-inspired metallic multi-walled carbon nanotube arrays on conductive barrier layer, to study the effect of the preparation process on the nature of carbon nanotubes as well as the effect of the subsequent surface treatment on the nanotube arrays and the connector's mechanical and electrical properties and reliability, and to seek for suitable operating parameters; At the same time, it further explores the connection mechanism of the connector, ultimately, obtains nanoconnectors with selectivity,

英文关键词： Multiwalled carbon nanotubes；Bio-inspired connectors；PECVD；Surface modification；Flexibility