基于表面态调控的W18O49纳米线基室温气体传感器及其自组装研究

项目名称： 基于表面态调控的W18O49纳米线基室温气体传感器及其自组装研究

项目编号： No.61274074

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 无线电电子学、电信技术

项目作者： 秦玉香

作者单位： 天津大学

项目金额： 82万元

中文摘要： NO2是一种对环境和人类健康存在巨大威胁的典型大气污染物，低功耗高性能NO2气体传感器的研究与开发具有重要的实际需求意义。本项目针对新一代气敏传感器的性能特征和研究现状，围绕能够实现NO2气体高灵敏度室温探测的高性能低功耗微传感器探索这一主要目标，提出一种结构简单、性能稳定、易于集成的基于表面态调控的W18O49纳米线基新型NO2室温气体传感器研究。以电极表面W18O49纳米线的图形化准定向原位生长和电极之间纳米线电接触的同步自组装，形成一种结构新颖、性能可靠的纳米线传感元件，克服二次组装工艺的技术缺陷，进一步基于半导体表面态理论，通过结构和表面改性调控纳米线表面态实现纳米线的室温表面反型而获得高的室温气敏灵敏度。本项目通过对表面态有效调控技术和器件自组装工艺以及气敏与纳米效应机制的积极探索，以多学科交叉性研究推进易于集成的、基于一维纳米结构的新一代高性能低功耗气体传感器目标的实现。

中文关键词： 半导体金属氧化物；气体传感器；纳米线；敏感性能；敏感机理

英文摘要： NO2 is a typical kind of atmospheric pollutant that would bring serious environmental issues and cause great harm to human health. Therefore it will be an actual demand to research and develop NO2 sensors with high performance and low power consumption. Considering the trend and actuality of research on gas sensor and aiming at the detection of NO2 gas with high sensitivity at room temperature, a study on a new type of room-temperature NO2 gas sensor, which has simple structure, solid performance and is easy to integrate, based on W18O49 nanowire with surface states modulation will be performed. The nanowires-based gas sensor with novel structure and high reliability will be realized through the growth in situ of quai-oriented W18O49 nanowires on the patterned electrode surface and the synchrotron self-assembly of the electrical contacts to nanowires. The developed technology to fabricate nanowires-based sensor can overcome the drawbacks from currently available secondary assembly craft. Furthermore, high sensitivity at room temperature for the W18O49 nanowires-based sensor can be achieved due to the formation of the inversion layer induced by the surface states modulation. During the execution of the project, the effective modulation technique for the surface states and the self-assembly technique for the devic

英文关键词： semiconductor metal oxide；gas sensor；nanowire；sensing properties；sensing mechanism