基于多孔硅的高效率中子探测器关键技术研究

项目名称： 基于多孔硅的高效率中子探测器关键技术研究

项目编号： No.11475151

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 数理科学和化学

项目作者： 范晓强

作者单位： 中国工程物理研究院核物理与化学研究所

项目金额： 96万元

中文摘要： He-3资源的严重短缺，使得替代He-3的新型高效率中子探测器技术研究尤为迫切。多孔硅中子探测器是一种具有三维结构的高效率固体热中子半导体探测器,它由高深宽比的微米多孔硅和孔内的固体中子转换材料(高浓缩度的6LiF或10B粉末)组成，这种结构能解决二维平面半导体中子探测器存在的探测效率较低（<5%）的问题。本项目将重点解决高效率多孔硅中子探测器的物理设计、高深宽比的干法刻蚀硅工艺、低漏电流的半导体器件制备以及致密中子转换材料填充等关键技术问题，从而实现热中子本征探测效率大于50%、n/γ甄别比大于1e5的原型样机研制。多孔硅中子探测器具有效率高、体积小、时间响应快、工作偏压低以及易于与读出电子学集成等独特优点，可广泛应用于中子散射研究、国土安全、军控核查以及中子剂量防护等领域。本项目的实施将为新型高效率多孔硅中子探测器国内自主开发与应用奠定基础。

中文关键词： 多孔硅；中子探测器；探测效率；半导体

英文摘要： The serious shortage of He-3 makes the new high-efficiency neutron detector technology research for He-3 replacement particularly urgent. Micro-structured silicon neutron detector(MSND) is a kind of high efficiency solid semiconductor detector with three-dimensional structure, which consists of high aspect ratio micron perforated silicon and solid neutron conversion material (high concentration 6LiF or 10B powder), with such a structure it can solve the problem of low detection efficiency（<5%） existed in the two-dimensional planar semiconductor neutron detector. To develop a prototype with the thermal neutron intrinsic detection efficiency greater than 50%, n/γ discrimination greater than 1e5，this project will focus on some critical technology problems such as the physical design of high efficiency MSND, dry etching with high aspect ratio, the fabrication of low leakage current semiconductor devices and neutron converter material backfilling, etc. The MSND with high efficiency , small size, fast response time , low power and the ability to integrate with readout electronics, can be widely used in neutron scattering studies, homeland security, inventory verification， neutron dose protection and other fields. Implementation of this project will lay the foundation for independent development and application of new MSND, and make contribution to 3He replacement.

英文关键词： Porous Silicon;Neutron Detector;Detection Effciency;Semiconductor