基于氘、氟掺杂氧化锌薄膜晶体管的透明指纹识别系统研究

项目名称： 基于氘、氟掺杂氧化锌薄膜晶体管的透明指纹识别系统研究

项目编号： No.61501401

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 叶志

作者单位： 浙江大学

项目金额： 23万元

中文摘要： 随着移动互联网的飞速发展，使用移动支付的金额越来越大，针对移动智能终端的信息安全问题日趋突显出来；特别是智能手表即将普及，但简便、安全的认证方式仍然缺失。因此，本课题提出研究透明指纹识别系统，提升安全性、体验性和美观性，符合科学技术发展趋势。但是透明指纹识别系统还存在根本的科学问题没有得到很好解决，即透明基底微小电容的检测和高性能的透明薄膜晶体管的获得。本项目针对这两个问题提出科学合理的解决方案，采用多级放大电路以及氘、氟掺杂氧化锌薄膜晶体管，实现飞法级电容检测和可靠性高、均匀性好的透明器件制备。研究思路是从器件到系统、层层递进、有机结合，以电路设计为核心，器件制备为基础，最后到系统集成，完成原型搭建和调试。整个系统的开发将在理论和实验上，为下一代基于移动终端的透明指纹识别屏提供有益参考。

中文关键词： 薄膜晶体管；氧化锌；指纹识别；金属氧化物；氘气

英文摘要： Recently, the mobile internet develops rapidly. Most people use the mobile device to trade with each other. The amount of mobile payment becomes more and more huge. The problem of information security based on the smart mobile terminal will be important and emergent. Especially, the smart watch is going to be popular, but it still lacks suitable, convenient and safe authentication. Thus, the present project proposes the study of transparent fingerprint system. This system improves the security, experience and appearance, following the trend of science and technology. However, there are some fundamental scientific problems needed to solve, such as the detection of tiny capacitance and the high performance of transparent thin film transistor (TFT). In this project, multi-grade amplification circuits and deuterium, fluorine doped ZnO TFTs are proposed to detect the fF grade capacitance and obtain the transparent TFT with high reliability and good uniformity. The works will be carried out in terms of circuit design, device fabrication and system integration. From device to system, the developing and testing of the whole system will provide beneficial theoretical and experimental reference for the next generation transparent fingerprint panel.

英文关键词： Thin film transistor;Zinc oxide;Fingerprint;Metal oxide;Deuterium